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                                          Advanced Specialty Gas Equipment

                                          MASS FLOW SYSTEMS
                                          Control Modules—Specification

                                          Control Module Mass Flow

                                          Table llI, Specifications—Mass Flow Control Modules

                                            Fast Response
                                          Module Models 1FRC–17FRC
                                          Fast Response
                                          Module Models 18FRC–19FRC
                                          Fast Response
                                          Module Models 20FRC–24FRC
                                          High Pressure
                                          Module Models 6HPC–16HPC
                                          Operating Pressure Range 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 4500 psig
                                          Operating Temperature Range 40°F to 150°F 40°F to 150°F 40°F to 150°F 40°F to 150°F
                                          Maximum Flow Capacity See Table V See Table V See Table V See Table V
                                          Minimum Flow Capacity 2% of max.
                                          flow capacity
                                          2% of max.
                                          flow capacity
                                          2% of max.
                                          flow capacity
                                          2% of max.
                                          flow capacity
                                          Accuracy ± 1% of full scale at calibrated conditions
                                          ± 1% of full scale at calibrated conditions ± 1% of full scale at calibrated conditions ± 1% of full scale at calibrated conditions
                                          Repeatability ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading
                                          Response Time 3 seconds max.¹ 3 seconds max.¹ 3 seconds max.¹ 15 seconds max.¹
                                          Maximum Pressure Drop 50 psi differential 50 psi differential 290 psi differential 50 psi differential
                                          Minimum Pressure Drop 5 psi differential 10 psi differential 22 psi differential 5 psi differential
                                          Mounting Attitude Sensitivity ± 0.5% full scale² ± 0.5% full scale² ± 0.5% full scale² ± 0.25% full scale²
                                          Inlet and Outlet Connections 1/4" compression³ 3/8" compression³ 1/2" NPT female5 1/4" compression³
                                          Leak Integrity 1 x 10–9atm.
                                          scc/sec Helium
                                          1 x 10–9atm.
                                          scc/sec Helium
                                          1 x 10–9atm.
                                          scc/sec Helium
                                          1 x 10–9atm.
                                          scc/sec Helium
                                          Dimensions (inches) 5.48 x 1.48 x 5.024 5.68 x 1.75 x 5.824 7.00 x 3.30 x 7.9 4.92 x 1.00 x 5.054
                                          Weight (approximate) 2.5 lbs. 3 lbs. 15 lbs. 1.5 lbs.
                                          Electrical Connection 15-Pin Type D
                                          male connector
                                          15-Pin Type D
                                          male connector
                                          15-Pin Type D
                                          male connector
                                          15-Pin Type D
                                          male connector
                                          Power Requirements +15 VDC at 35mA
                                          -15 VDC at 180mA
                                          +15 VDC at 350mA
                                          -15 VDC at 350mA
                                          +15 VDC at 35mA
                                          -15 VDC at 180mA
                                          +15 VDC at 215mA
                                          -15 VDC at 15mA
                                          Flow Output Signal 0–5 VDC
                                          into 2000 ohm
                                          (or greater) load
                                          0–5 VDC
                                          into 2000 ohm
                                          (or greater) load
                                          0–5 VDC
                                          into 2000 ohm
                                          (or greater) load
                                          0–5 VDC
                                          into 1000 ohm
                                          (or greater) load
                                          Command Signal 0–5 VDC 0–5 VDC 0–5 VDC 0–5 VDC
                                          1. To within 2% of set point. Response time specification shown is with "soft start" feature disabled. With soft start enabled, response time will increase by a factor of approximately 4 to 5 times stated specification. Modules are shipped with this feature disabled.
                                          2. Maximum deviation from stated accuracy specification.
                                          3. VCR® connections are available on special order.
                                          4. Dimensions include compression end connectors.
                                          5. 1" or 11⁄2" NPT or 1⁄2", 3⁄4" or 1" compression connections available on special order.
                                           

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