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                                          Advanced Specialty Gas Equipment

                                          MASS FLOW SYSTEMS
                                          Sensors—Specifications and Materials of Construction

                                          ASGE Mass Flow Sensor

                                          Table VI, Specifcations—Mass Flow Sensors

                                            Fast Response
                                          Sensors
                                          1FRM–17FRM
                                          Fast Response
                                          Sensors
                                          18FRM–19FRM
                                          Fast Response
                                          Sensors
                                          20FRM–24FRM
                                          Operating Pressure Range 570 torr to 4500 psig 570 torr to 1500 psig 570 torr to 1500 psig
                                          Operating Temperature Range 40°F to 150°F 40°F to 150°F 40°F to 150°F
                                          Maximum Flow Capacity See Table VIII See Table VIII See Table VIII
                                          Minimum Flow Capacity 2% of max.
                                          flow capacity
                                          2% of max.
                                          flow capacity
                                          2% of max.
                                          flow capacity
                                          Accuracy ± 1% of full scale
                                          at calibrated conditions
                                          ± 1% of full scale
                                          at calibrated conditions
                                          ± 1% of full scale
                                          at calibrated conditions
                                          Repeatability ± 0.25% of full scale ± 0.25% of full scale ± 0.25% of full scale
                                          Response Time 3 seconds max¹ 3 seconds max¹ 3 seconds max¹
                                          Pressure Drop 10" water column
                                          at maximum flow
                                          10" water column
                                          at maximum flow
                                          10" water column
                                          at maximum flow
                                          Mounting Attitude Sensitivity ±0.5% of Full Scale² ±0.5% of Full Scale² ±0.5% of Full Scale²
                                          Inlet and Outlet Connections 1/4" compression³ 3/8" compression³ 1/2" NPT female5
                                          Dimensions (inches) 5.50 x 1.48 x 4.324 5.50 x 1.48 x 4.324 7.00 x 3.30 x 6.10
                                          Weight (approximate) 2 lbs. 2 lbs. 13 lbs.
                                          Electrical Connection 15–pin Type D
                                          male connector
                                          15–pin Type D
                                          male connector
                                          15–pin Type D
                                          male connector
                                          Power Requirements +15 VDC at 35mA
                                          -15 VDC at 35mA
                                          +15 VDC at 35mA
                                          -15 VDC at 35mA
                                          +15 VDC at 35mA
                                          -15 VDC at 35mA
                                          Flow Output Signal 0–5 VDC into 3000 ohm
                                          (or greater) load
                                          0–5 VDC into 3000 ohm
                                          (or greater) load
                                          0–5 VDC into 2000 ohm
                                          (or greater) load
                                          1. To within 2% of set points.
                                          2. Maximum deviation from stated accuracy specification.
                                          3. VCR® connections are available on special order.
                                          4. Dimensions include compression end connectors.
                                          5. 1" or 1 1/2" NPT or 1/2", 3/4" or 1" compression connections available on special order.

                                          Table VII, Materials of Construction—Mass Flow Sensors (All Models)

                                          Metal Parts Exposed to Gas: Type 316 Stainless Steel
                                          Seals: Viton® (Buna-N or Kalrez® Seals available on special order)

                                           

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