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                                          Advanced Specialty Gas Equipment

                                          MASS FLOW SYSTEMS
                                          Sensors —Selection Guide

                                          Table VIII, Selection Guide—Mass Flow Sensors

                                          Maximum Flow Capacity (Minimum Capacity = 2% of Maximum)
                                          Model
                                          Numbers
                                          FastResponse
                                          Sensors
                                          Air, Argon,
                                          Carbon Monoxide,
                                          Deuterium,
                                          Helium, Hydrogen,
                                          Krypton, Neon,
                                          Nitrogen,
                                          Oxygen, Xenon
                                          Ammonia, Arsine,
                                          Carbon Dioxide,
                                          Chlorine,
                                          Hydrogen Chloride,
                                          Hydrogen Sulfide,
                                          Methane,
                                          Nitrous Oxide,
                                          Phosphine
                                          Acetylene,
                                          Ethylene, Silane,
                                          Sulfur Dioxide
                                          Dichlorosilane,
                                          Ethane,
                                          Halocarbon 13,
                                          Halocarbon 13B1,
                                          Halocarbon 14 ,
                                          Propylene
                                          Butane,
                                          Halocarbon12,
                                          Isobutane,
                                          Propane, Sulfur
                                          Hexafluoride
                                          1FRM 5 sccm*
                                          2FRM 10 sccm* 5 sccm 5 sccm
                                          3FRM 20 sccm 10 sccm 10 sccm 5 sccm
                                          4FRM 30 sccm 20 sccm 20 sccm 310 sccm 5 sccm
                                          5FRM 50 sccm 30 sccm 30 sccm 20 sccm 10 sccm
                                          6FRM 100 sccm 50 sccm 50 sccm 30 sccm 20 sccm
                                          7FRM 200 sccm 100 sccm 100 sccm 50 sccm 30 sccm
                                          8FRM 300 sccm 200 sccm 200 sccm 100 sccm 50 sccm
                                          9FRM 500 sccm 300 sccm 300 sccm 200 sccm 100 sccm
                                          10FRM 1000 sccm 500 sccm 500 sccm 300 sccm 200 sccm
                                          11FRM 2000 sccm 1000 sccm 1000 sccm 500 sccm 300 sccm
                                          12FRM 3000 sccm 2000 sccm 2000 sccm 1000 sccm 500 sccm
                                          13FRM 5000 sccm 3000 sccm 3000 sccm 2000 sccm 1000 sccm
                                          14FRM 10 slpm 5000 sccm 5000 sccm 3000 sccm 2000 sccm
                                          15FRM 15 slpm 10 slpm 10 slpm 5000 sccm 3000 sccm
                                          16FRM 20 slpm 15 slpm 15 slpm 10 slpm 5000 sccm
                                          17FRM 30 slpm 20 slpm 20 slpm 15 slpm 10 slpm
                                          18FRM 50 slpm 30 slpm 30 slpm 20 slpm 15 slpm
                                          19FRM 100 slpm 50 slpm 50 slpm 30 slpm 20 slpm
                                          20FRM 150 slpm 100 slpm 100 slpm 50 slpm 30 slpm
                                          21FRM 200 slpm 150 slpm 150 slpm 100 slpm 50 slpm
                                          22FRM 300 slpm 200 slpm 200 slpm 150 slpm 100 slpm
                                          23FRM 500 slpm 300 slpm 300 slpm 200 slpm 150 slpm
                                          24FRM 1000 slpm 500 slpm 500 slpm 300 slpm 200 slpm
                                          * Minimum flow range available for hydrogen and helium service is 20 sccm.
                                          When ordering Mass Flow Sensors, specify gas service, operating pressure, operating temperature and flow range for each sensor. Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRM–17FRM and 90 psig on models 18FRM–24FRM is included. Calibrations on models 1FRM–17FRM for pressures above 200 psig and above 90 psig on models 18FRM–19FRM are available as an option. See Optional Equipment Table.
                                          One 25 ft. interconnecting cable will be included with each Mass Flow Sensor ordered.

                                          Optional Equipment

                                          Equipment Part No.
                                          Inlet Filter, High Purity, Type 316 Stainless Steel
                                          (fits between Sensor and Inlet Fitting -(PDF))
                                             0.5 micron Filter, Viton Seal** FM4800
                                             2 micron Filter, Viton Seal** FM4802
                                             5 micron Filter, Viton Seal** FM4805
                                             10 micron Filter, Viton Seal** FM4810
                                             40 micron Filter, Viton Seal** FM4840
                                          Low Flow (10 sccm or less, 20 sccm for helium and hydrogen)
                                             Calibration--Control Modules only CCO-50
                                          High Pressure Calibration CCO-150
                                          ** Buna-N or Kalrez® Seals available on special order.

                                           

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